Enye indlela yegesi-yesigaba, indlela ye-chemical vapor deposition (CAV), eyaziwa nangokuthi indlela ye-pyrolysis, indlela eyomile noma indlela yokuvutha. Izinto zayo zokusetshenziswa ngokuvamile ziyi-silicon tetrachloride, umoya-mpilo (noma umoya) ne-hydrogen, esabela emazingeni okushisa aphezulu.
The reaction equation is: SiCl4+2H2+O2 - >I-SiO{{0}HCl. Umoya ne-hydrogen ngokulandelana kwazo kungaphansi kwengcindezi, ukuhlukaniswa, ukupholisa kanye nokuphelelwa amanzi emzimbeni, ukomiswa kwejeli ye-silica, ukususwa kothuli nokuhlunga ngaphambi kokuthunyelwa esithandweni sokwenziwa se-hydrolysis. Ngemva kokuba impahla eluhlaza ye-silicon tetrachloride ithunyelwe kukholomu ye-distillation ukuze i-distillation, iyashiswa futhi ihwamuke ku-evaporator, bese ithunyelwa esithandweni sokwenziwa se-hydrolysis esinomoya owomile nohlungiwe njengesithwali. I-Silicon tetrachloride ihwamuka kumazinga okushisa aphezulu (izinga lokushisa lelangabi elingu-1000-1800℃) bese lingena ngegesi-i-phase hydrolysis enenani elithile le-hydrogen nomoya-mpilo (noma umoya) cishe ngo-1800 degree. Kuleli qophelo, izinhlayiya ze-silica zesigaba segesi ezikhiqizwayo zinhle kakhulu futhi zakha ama-aerosol ngamagesi, okunzima ukuwabamba.
Ngakho-ke, ziqala zihlanganiswe zibe yizinhlayiya ezinkulu ku-aggregator, bese ziqoqwa yisihlukanisi sesishingishane, bese zithunyelwa esithandweni sokuqeda i-acidity. Igesi-i-silica yesigaba igezwa nge-nitrogen{2}}equkethe umoya kuze kube inani le-PH libe ngu-4 kuya ku-6, okuwumkhiqizo oqediwe.